- The MX60x series measure Resistivity or Sheet Resistance of silicon and other materials.
Categories: E+H Metrology, Electrical & Electronics, Inspection, Test & Measurement Equipment, Semiconductor, Wafer Geometry Gauge
The MX60x series measure Resistivity or Sheet Resistance of silicon and other materials.
*1 Option/Feature of MX 604-ST, MX 608, MX 608-q and MX 6012
*2 Option of MX 608, MX 608-q and MX 6012
Applications
- Reclaimer
- R&D
- In-process control for
- Thickness
- TTV
- Resistivity / Sheet Resistance
- RRV (partially)
- Dopant
