- With maximum uniformity, superior gas and RF distribution, a proprietary controlling software and compliance to CE and SEMI international standards, our plasma cleaning and etching systems are ideal for all applications where process reliability and repeatability are a must.
Categories: Electrical & Electronics, Plasma Cleaning & Etching System, Production Equipment, SCI Plasma, Semiconductor
ARES – Large Surface Batch Plasma System
Ares is a standalone batch plasma cleaning system, designed for large surface substrates or matrix trays.
Ares’ chamber is specially designed to handle high power conditions required when performing etching processes.
Product Features:
The features contained in this system allow reliable and repeatable cycling of the plasma process for 24/7 operation.
