Automated systems for accurate wafer weight sorting in semiconductor manufacturing.
Categories: Semiconductor, Semiconductor Automated Handling System (AHS Series), Wafer Sorting System
Description
WSS2200 is designed with standard of four load ports that can support for 6” and 8” wafer size. The ports are designed to handle 6” SEMI standard open cassette and 8” SEMI standard open cassette. During wafer sorting process, the robotic arm moves to designated input load port for wafer loading process. The movement of X, Y and Z axis are controlled by the Hirata robot controller. Loaded wafer from input load port transferred to pre-aligner for wafer orientation check and alignment wafer ID read by OCR and recorded into pc/server through TCP/IP or SECS/GEM. The wafer transferred from input to output load port by using recipe control.
Specifications
- Designed for SEMI Standard of 150mm & 200mm Open Cassette Comes with Four Load Ports
- Dual Arm Hirata Automatic Wafer Loader/Unloader (Robot) with Built-in Wafer Mapping Sensor
- Wafer Pre-aligner for Orientation Check & Wafer Alignment and Programmable Wafer ID Reader
- Programmable Wafer Sorting Recipe & Robot Controller
- Programmable Sorting Method such as Wafer ID Sorting, Sequential Sorting, Slot to Slot Sorting, Drag and Drop Sorting and Sub-Lot Sorting
- TCP-IP, RS232 Data Interface & SECS GEM Interfaces (Optional)
