Automated systems for accurate wafer weight sorting in semiconductor manufacturing.
Categories: Semiconductor, Semiconductor Automated Handling System (AHS Series), Wafer Sorting System
The WSS2150 Wafer Weight Sorting System allows to determine the weight of each wafer before it be sorted into few of the clamshells or half-height open cassette. It is designed for 6″ of the wafer sizes. Wafer is transferred from open cassette to clamshell for spin-rinse-dry (SRD) process. Weight of each wafer in clamshell for pre-rough process is determined. The wafers sort to the clamshell/half-height open cassette according to their weight loss range. All the wafers will be transferred back to the open cassette once all of wafers achieve the weight required after going through repeating SRD process.
Specifications
- 2x Open Cassettes Station with Integrated Wafer Protrusion Detection Sensor (Universal for both 6” & 8” wafers)
- 2x Wafer Canister Station (Configurable to 1x Canister and 1x Wafer Jar with Optional Cartesian Robot Module)
- 1x Interleaf Paper Port (Auto-Conversion between 6” & 8”)
- Hirata 4-Axis Robotic Arm with Wafer Flipping Feature.
- Built-in Color Sensor for Wafer, Interleaf Paper or Ring Spacer Detection and Built-in Height Sensor on Canister & Wafer Jar Loading Port for Robotic Handling Accuracy (1x Height Sensor on “Separator Canister” Port)
