Contactless Wafer Geometry Gauge – MX 20x Series
Categories: E+H Metrology, Electrical & Electronics, Inspection, Test & Measurement Equipment, Semiconductor, Wafer Geometry Gauge The E+H geometry gauges are based on two heavy plates mounted parallel to each other. Embedded in the plate is a set of capacitive distance sensors. The wafer will be moved manually or automatically between the plates and measured without […]
Contactless One-Point Wafer Thickness Gauge – MX 30x Series
Categories: E+H Metrology, Electrical & Electronics, Inspection, Test & Measurement Equipment, Semiconductor, Wafer Geometry Gauge The E+H geometry gauges are based on two heavy plates mounted parallel to each other. Embedded in the plate is a set of capacitive distance sensors. The wafer will be moved or automatically between the plates and measured without any […]
Contactless One-Point Wafer Resistivity or Sheet Resistance – Mx 60 Series
Categories: E+H Metrology, Electrical & Electronics, Inspection, Test & Measurement Equipment, Semiconductor, Wafer Geometry Gauge The MX60x series measure Resistivity or Sheet Resistance of silicon and other materials. *1 Option/Feature of MX 604-ST, MX 608, MX 608-q and MX 6012*2 Option of MX 608, MX 608-q and MX 6012 Applications